Saint-Gobain Abrasives' Electronics
Saint-Gobain Abrasives' Electronics

LED Substrate Thinning

With the development of new technology in LED manufacture, new processes for higher productivity (grinding Vs lapping) are also being evolved. Norton FAVS™ grinding wheels are designed to grind material like Silicon Carbide, Sapphire, and other hard materials and achieve very good surface finishes and low sub surface damages along with high productivity.


In grinding of these hard and brittle material, one of the most important characteristic is the sub surface damage. The base material used for LED manufacturing tends to become "foggy" if sub surface cracks are allowed to remain. These cracks are usually a result of the mechanical processes carried out to slice the wafers or thin the wafers. These reduce the wafer strength and causes low yields.

Norton FAVS™ wheels are designed to eliminate these cracks and make the wafers strong. In order to achieve an acceptable productivity rate, the coarse wheel needs to be specially designed for free cutting action and self dressing. This allows the wheel to be used without any conditioning during the life time. 

The Norton FAVS™ wheels can be used to thin down as sawn wafers (2", 3", 4") to the required size with finishes below 20 °A Ra. With the right combination of the coarse and fine specification for a particular machine tool, the LED substrate can be ground instead of lapped for the initial wafer preparation. 

The same process can then be used for the back grind operation after the devices are integrated on the substrate. Depending on the final finish required, the grind wheel specification can be altered. SubstrateThinning2-pd


Different materials that can be ground with this new type of bond system (XL040 for the coarse grind and XL073 for the fine grind)

We also offer a Cu free bond system -  XL111 for the fine grind and XL112 for the coarse grind stations 

Following material can be ground at an optimized cost of ownership and very good finish (Below 20 °A Ra)

  • Sapphire
  • Silicon Carbide
  • Quartz
  • Glass
  • Lithium Niobate
  • Lithium Tantalate